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Tappi J., 76(1), 85-90(1993).
Application of New Profilometry Using Topographic SEM to Paper Surface Topography
Toshiharu Enomae, Fumihiko Onabe and Makoto Usuda
Faculty of Agriculture, University of Tokyo
ABSTRACT
The topographic SEM is a new technique for constructing a very fine 3-dimensional profile accurately and rapidly. Its principle is based on the theory that a specimen angle can be calculated from signals output by four detectors attached to a SEM. The purpose of this study is to check the accuracy of height data by this technique and to examine the applicability to paper. The accuracy of calculated profile curves obtained by this technique was checked by comparing to those with a stylus instrument. Then, topographic SEM images were taken and the findings on them were discussed for woodfree paper and cast coated paper. As a result, the height data obtained by the topographic SEM was proved accurate for woodfree paper and they provided more detailed information for profile curves of cast coated paper. Moreover, new geometrical surface features of cast coated paper were observed, which could not have been made possible by the conventional SEM images.